QUANTUM TUNNELING IN FLASH MEMORY TECHNOLOGY: ENABLING SCALABLE NON-VOLATILE STORAGE
Abstract
Modern non-volatile memory technology relies heavily on quantum tunneling, which allows electrons to pass through insulating barriers that are otherwise impenetrable. This paper investigates the use of tunneling methods in flash memory designs to provide high-density and scalable storage. Reviewing tunneling physics in floating-gate and charge-trap memory, assessing barrier-engineering techniques, and investigating scalability options are the goals. Fourteen chosen publications published between 2010 to 2025 were the subject of a systematic literature review (SLR) with an emphasis on high-k dielectric materials, nanoscale device design, and tunneling-barrier engineering. The findings demonstrate that leakage can be decreased while programming efficiency is maintained by improving barrier thickness and dielectric characteristics. Furthermore, the advancement of 3D NAND technology depends heavily on sophisticated materials and device structures. This study indicates that quantum tunneling is still the key mechanism enabling next-generation scalable non-volatile memory, notwithstanding the reliability issues it introduces.
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References
2 Mehta D, Rahman M, Aono K, Chakrabartty S. 2022. An adaptive synaptic array using Fowler–Nordheim dynamic analog memory. Nat. Commun. 3(1): 1670.
3 Park JK, Kim SE. 2022. A review of cell operation algorithm for 3D NAND flash memory. Appl. Sci. 12(21): 10697.
4 Kim SW, Yoo JH, Park WJ, Lee CH, Lee JH, Kim JH, Uhm SH, Lee HC. 2024. Enhancing Charge Trapping Performance Of Hafnia Thin Films Using Sequential Plasma Atomic Layer Deposition. Nanomaterials. 14(20): 1686.
5 Shao MH, Zhao RT, Liu H, Xu WJ, Guo YD, Huang DP, Ren TL. 2024. Challenges and recent advances in HfO₂-based ferroelectric films for non-volatile memory applications. Chip. 3(3): 100101.
6 Spassov D, Paskaleva A. 2023. Challenges to optimize charge trapping non-volatile flash memory cells: A case study of HfO₂/Al₂O₃ nanolaminated stacks. Nanomaterials. 13(17): 2456.
7 Hwang I, Kim J, Lee J, Jung Y, Yoon C. 2025. Memory devices with HfO₂ charge-trapping and TiO₂ channel layers: Fabrication via remote and direct plasma atomic layer deposition and comparative performance evaluation. Materials (Basel). 18(5): 948.
8 Haddaway NR, Page MJ, Pritchard CC, McGuinness LA. 2022. PRISMA2020: An R package and Shiny app for producing PRISMA 2020-compliant flow diagrams. Campbell Syst. Rev. 18(2): e1230.
9 Gupta D, Upadhyay AK, Beohar A, Vishvakarma SK. 2023. Improvement of memory performance of 3D NAND flash memory with retrograde channel doping. Memories – Mater. Devices, Circuits Syst. 4: 100031.
10 Lee S, Kim G, Nam Y, Jeong Y, Kang H, Kim W, Jeon S. 2025. Stabilized negative capacitance for near-theoretical efficiency and high reliability in charge trap flash memory. Mater. Today Phys. 58: 101865.
11 Reiter T, Klemenschits X, Filipovic L. 2022. Impact of plasma induced damage on the fabrication of 3D NAND flash memory. Solid. State. Electron. 192: 108261.
12 Li Y. 2020. 3D NAND memory and its application in solid-state drives: Architecture, reliability, flash management techniques, and current trends. IEEE Solid-State Circuits Mag. 12(4): 56.
13 Toifl A, Quell M, Klemenschits X, Manstetten P, Hössinger A, Selberherr S, Weinbub J. 2020. The level-set method for multi-material wet etching and non-planar selective epitaxy. IEEE Access. 8: 115406.
14 Gopal G, Varma T. 2022. Simulation-based analysis of ultrathin-body double gate ferroelectric TFET for enhanced electrical performance. Silicon. 14(2): 6553.
15 Dutta R, Subash TD, Paitya N. 2022. Improved DC performance analysis of a novel asymmetric extended source tunnel FET (AES-TFET) for fast switching application. Silicon. 14(8): 3835.
16 Yang Y, Luo Z, Wang S, Huang W, Wang G, Wang C, Xiao G. 2021. Electric-field-assisted non-volatile magnetic switching in a magnetoelectronic hybrid structure. Science (80-. ). 24(7): 102734.
17 Liao J, Dai S, Peng RC, Yang J, Zeng B, Liao M, Zhou Y. 2023. HfO₂-based ferroelectric thin film and memory device applications in the post-Moore era: A review. Fundam. Res. 3(3): 332.
18 Zhang Y, Wang C, Huang H, Lu J, Liang R, Liu J, Zhang J. 2020. Deterministic reversal of single magnetic vortex circulation by an electric field. Sci. Bull. 65(15): 1260.
19 Kum HS, Lee H, Kim S, Lindemann S, Kong W, Qiao K, Kim J. 2020. Heterogeneous integration of single-crystalline complex-oxide membranes. Nature. 58(7793): 75.
20 Swathi SP, Angappane S. 2022. Enhanced resistive switching performance of hafnium oxide-based devices: Effects of growth and annealing temperatures. J. Alloys Compd. 913: 165251.
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